Aluminium atom density and temperature in a dc magnetron discharge determined by means of blue diode laser absorption spectroscopy

✍ Scribed by Wolter, Matthias; Do, Hoang Tung; Steffen, Hartmut; Hippler, Rainer

• Book ID: 121440597
• Publisher: Institute of Physics
• Year: 2005
• Tongue: English
• Weight: 269 KB
• Volume: 38
• Category: Article
• ISSN: 0022-3727
• DOI: 10.1088/0022-3727/38/14/014