Analysis of DC magnetron discharges in Ar- gas mixtures. Comparison of a collisional-radiative model with optical emission spectroscopy

✍ Scribed by Debal, F; Bretagne, J; Jumet, M; Wautelet, M; Dauchot, J P; Hecq, M

• Book ID: 121434519
• Publisher: Institute of Physics
• Year: 1998
• Tongue: English
• Weight: 305 KB
• Volume: 7
• Category: Article
• ISSN: 0963-0252
• DOI: 10.1088/0963-0252/7/2/016