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Tin oxide nanocrystalline films and nanowires for gas sensing applications

✍ Scribed by Alexandra Tischner; Anton Köck; Thomas Maier; Christian Edtmaier; Christian Gspan; Gerald Kothleitner

Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
626 KB
Volume
86
Category
Article
ISSN
0167-9317

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Highly sensitive, Si-integrated gas sensors based on undoped, In-and Sb-doped nanocrystalline SnO 2 -films, have been fabricated by spray pyrolysis. We have found that the In-doped gas sensors show significantly improved sensitivity for CH 4 detection and low sensitivity for H 2 detection, while Sb-