In- and Sb-doped tin oxide nanocrystalline films for selective gas sensing

✍ Scribed by Alexandra Zima; Anton Köck; Thomas Maier

• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 854 KB
• Volume: 87
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2009.11.103

✦ Synopsis

Highly sensitive, Si-integrated gas sensors based on undoped, In-and Sb-doped nanocrystalline SnO 2 -films, have been fabricated by spray pyrolysis. We have found that the In-doped gas sensors show significantly improved sensitivity for CH 4 detection and low sensitivity for H 2 detection, while Sb-doped sensors exhibit high sensitivity towards H 2 and comparatively low sensitivity for CH 4 detection. The results demonstrate that a device implementing both a In-doped SnO 2 sensor as well as a Sb-doped sensor should be capable for well defined discrimination of CH 4 and H 2 -gases when mixed to synthetic air as background gas. This indicates that proper doping of SnO 2 -films is a powerful strategy for the future realization of Si-integrated multi-gas sensor systems.