Heat treatment in hydrogen gas and plasma for transparent conducting oxide films such as ZnO, SnO2 and indium tin oxide

✍ Scribed by T. Minami; H. Sato; H. Nanto; S. Takata

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 383 KB
• Volume: 176
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(89)90100-4