Silicon nanowires by combined nanoimprint and angle deposition for gas sensing applications

✍ Scribed by Chen Gao; Zhen-Cheng Xu; Shao-Ren Deng; Jing Wan; Yifang Chen; Ran Liu; Ejaz Huq; Xin-Ping Qu

• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 903 KB
• Volume: 88
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2011.02.044