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TiN films produced by pulsed ion beam and vapour deposition

โœ Scribed by Z.L. Yu; J.G. Deng; J.J. He; J. Zhou; C.D. Hu

Book ID
113280468
Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
358 KB
Volume
44
Category
Article
ISSN
0168-583X

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๐Ÿ“œ SIMILAR VOLUMES

Fundamental study of TiN films deposited
Fundamental study of TiN films deposited by ion beam mixing
โœ K. Hayashi; K. Sugiyama; K. Fukutani; H. Kittaka ๐Ÿ“‚ Article ๐Ÿ“… 1989 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 393 KB

A study was performed to investigate the influence of process parameters on the properties of TiN films deposited by ion beam mixing. Relatively dense and homogeneous structures or dense columnar structures were observed by scanning electron microscopy. From the results of X-ray diffraction and X-ra