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Adherent TiN films produced by ion beam enhanced deposition at room temperature

✍ Scribed by R.A. Kant; B.D. Sartwell; I.L. Singer; R.G. Vardiman


Book ID
113277204
Publisher
Elsevier Science
Year
1985
Tongue
English
Weight
696 KB
Volume
7-8
Category
Article
ISSN
0168-583X

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