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Time-resolved defect production and annealing during electron-beam processing of silicon

✍ Scribed by R. Langfeld; H. Baumann; K. Bethge; E. F. Krimmel; W. Wondrak

Publisher: Springer
Year: 1984
Tongue: English
Weight: 313 KB
Volume: 33
Category: Article
ISSN: 1432-0630
DOI: 10.1007/bf00614667

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