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Time-dependent response characteristics of pH-sensitive ISFET

✍ Scribed by Yu Dun; Wei Ya-dong; Wang Gui-hua


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
652 KB
Volume
3
Category
Article
ISSN
0925-4005

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Sensitization of dielectric surfaces by
✍ J.M. Chovelon; J.J. Fombon; P. Clechet; N. Jaffrezic-Renault; C. Martelet; A. Ny πŸ“‚ Article πŸ“… 1992 πŸ› Elsevier Science 🌐 English βš– 460 KB

The aim of this work is to prepare a pH sensing device working in a differential arrangement between an ISFET and a REFET. Two types of insulator surfaces have been tested: the pH sensitivity of silica is 36 mV pH\_' and that of the PECVD silicon oxynitride is nernstian. The grafting of these surfac