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Time-dependent angular distribution of sputtered particles from amorphous targets

✍ Scribed by Yasunori Yamamura

Book ID
113281303
Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
369 KB
Volume
45
Category
Article
ISSN
0168-583X

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A solid surface subjected to energetic ion bombardment generally develops characteristic structures, which may change the total and partial sputtering yields significantly. The change is caused by several competing effects, for instance, change of the effective projectile incidence angle, recapture