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Ti-Si-N films prepared by magnetron sputtering

✍ Scribed by Li Pan; Yizhen Bai; Dong Zhang; Jian Wang

Book ID: 113107609
Publisher: Nonferrous Metals Society of China
Year: 2012
Tongue: English
Weight: 329 KB
Volume: 31
Category: Article
ISSN: 1001-0521
DOI: 10.1007/s12598-012-0488-5

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