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Three-dimensional topography using an X-ray microbeam and novel slit technique

✍ Scribed by Tanuma, R. ;Kubo, T. ;Togoh, F. ;Tawara, T. ;Saito, A. ;Fukuda, K. ;Hayashi, K. ;Tsusaka, Y.

Book ID: 105364375
Publisher: John Wiley and Sons
Year: 2007
Tongue: English
Weight: 613 KB
Volume: 204
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.200675703

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✦ Synopsis

Abstract

This paper describes section topography using an X‐ray microbeam and a novel slit having a V‐shaped crevice (V‐slit). The V‐slit is characterized by a sharp‐pointed exponential transmission curve, which enables depth‐resolved imaging with high spatial resolution. An iterative deconvolution for image restoration is effectively executable, providing submicron resolution in cross‐sectional diffraction imaging. The new method is applied to the analysis of screw dislocation in a SiC diode. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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