Three-dimensional topography using an X-
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Tanuma, R. ;Kubo, T. ;Togoh, F. ;Tawara, T. ;Saito, A. ;Fukuda, K. ;Hayashi, K.
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Article
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2007
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John Wiley and Sons
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English
⚖ 613 KB
## Abstract This paper describes section topography using an X‐ray microbeam and a novel slit having a V‐shaped crevice (V‐slit). The V‐slit is characterized by a sharp‐pointed exponential transmission curve, which enables depth‐resolved imaging with high spatial resolution. An iterative deconvolut