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Three-dimensional nanolithography using proton beam writing

✍ Scribed by van Kan, J. A.; Bettiol, A. A.; Watt, F.

Book ID: 120244556
Publisher: American Institute of Physics
Year: 2003
Tongue: English
Weight: 599 KB
Volume: 83
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.1604468

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