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Proton beam writing of three-dimensional microcavities

✍ Scribed by Vanga, S.K.; Bettiol, A.A.

Book ID: 122768293
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 548 KB
Volume: 306
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2012.12.058

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