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Three-dimensional atomic-scale imaging of boron clusters in implanted silicon

✍ Scribed by O. Cojocaru-Mirédin; E. Cadel; F. Vurpillot; D. Mangelinck; D. Blavette

Book ID: 113897609
Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 209 KB
Volume: 60
Category: Article
ISSN: 1359-6462
DOI: 10.1016/j.scriptamat.2008.10.008

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