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Three-dimensional atom probe investigations of Ti–Al–N thin films

✍ Scribed by R. Rachbauer; E. Stergar; S. Massl; M. Moser; P.H. Mayrhofer

Book ID
113898015
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
302 KB
Volume
61
Category
Article
ISSN
1359-6462

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The reactive interdiffusion of Co /Al bi-layers is investigated by means of atom probe tomography. The samples are prepared by deposition of corresponding materials onto W substrate tips with a radius of curvature of |50 nm. Nucleation of 21 Al Co phase particles is detected only after reaching a cr