✦ LIBER ✦

Three-dimensional atom probe investigation of Co/Al thin film reaction

✍ Scribed by V. Vovk; G. Schmitz; R. Kirchheim

Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 404 KB
Volume: 70
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(03)00460-x

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✦ Synopsis

The reactive interdiffusion of Co /Al bi-layers is investigated by means of atom probe tomography. The samples are prepared by deposition of corresponding materials onto W substrate tips with a radius of curvature of |50 nm. Nucleation of 21 Al Co phase particles is detected only after reaching a critical concentration gradient of |0.3 nm at the interface. The fast 9 2 growth of the particles before the formation of a dense layer is explained by atomic transport through the incoherent interphase boundary. After consumption of the remaining pure Al, B2-ordered AlCo is detected as a second product phase.

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