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Thin silicon epitaxial layers on preannealed silicon substrates

✍ Scribed by Dr. G. Weidner; F.-G. Kirscht; F. Richter; W. Seifert; M. Weidner; B. Glück; M. Mai; Dr. A. Vargha Kalmanné; Dr. H. Rausch


Publisher
John Wiley and Sons
Year
1987
Tongue
English
Weight
506 KB
Volume
22
Category
Article
ISSN
0232-1300

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