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Liquid phase epitaxy of silicon on multicrystalline silicon substrates

✍ Scribed by K.J. Weber; A.W. Blakers


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
523 KB
Volume
154
Category
Article
ISSN
0022-0248

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Liquid Phase Epitaxial Growth of Silicon
✍ S. Berger; S. Quoizola; A. Fave; A. Ouldabbes; A. Kaminski; S. Perichon; N-E. Ch πŸ“‚ Article πŸ“… 2001 πŸ› John Wiley and Sons 🌐 English βš– 198 KB πŸ‘ 2 views

The aim of this experiment is to grow a thin silicon layer (<50Β΅m) by Liquid Phase Epitaxy (LPE) onto porous silicon. This one acts as a sacrificial layer in order to transfer the 50 Β΅m epitaxial layer onto foreign substrates like ceramics. After transfer, the silicon wafer is then re-usable. In thi