✦ LIBER ✦

Thin Si3N4 films on Si wafers

✍ Scribed by M. F. Ebel; H. Ebel; H. Buchner; R. Chabicovsky

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Ultraviolet laser ablation of Si3N4 thin

✍ Yasuo Takigawa; John C. Hemminger 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 352 KB

Preparation and dielectric properties of

✍ G. Rieder; F. Olcaytug 📂 Article 📅 1982 🏛 Elsevier Science 🌐 English ⚖ 229 KB

Charge trapping in silicon-rich Si3N4 th

✍ D.A. Buchanan; R.A. Abram; M.J. Morant 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 598 KB

Photoconduction in Si3N4 deposited on tu

📂 Article 📅 1980 🏛 Elsevier Science 🌐 English ⚖ 163 KB

Growth, characterization and micro-patte

✍ Min Wu; Jian Zhou; Zhigang Sun; Haihu Yu; Erdan Gu 📂 Article 📅 2008 🏛 Wuhan University of Technology 🌐 English ⚖ 374 KB

Reaction between reaction-bonded Si3N4an

✍ Yutaka Kagawa 📂 Article 📅 1985 🏛 Springer 🌐 English ⚖ 466 KB