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Thin oxide thickness extrapolation from capacitance-voltage measurements

✍ Scribed by Walstra, S.V.; Chih-Tang Sah


Book ID
114536882
Publisher
IEEE
Year
1997
Tongue
English
Weight
244 KB
Volume
44
Category
Article
ISSN
0018-9383

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It is well known that capacitance-voltage (C2V) measurements provide a simple determination of oxide thickness, but with the scaling down of components the classical method is not appropriated any more. We have observed that for two devices with the same oxide thickness and different surfaces, the c