✦ LIBER ✦
Estimating oxide thickness of tunnel oxides down to 1.4 nm using conventional capacitance-voltage measurements on MOS capacitors
✍ Scribed by Henson, W.K.; Ahmed, K.Z.; Vogel, E.M.; Hauser, J.R.; Wortman, J.J.; Venables, R.D.; Xu, M.; Venables, D.
- Book ID
- 115542411
- Publisher
- IEEE
- Year
- 1999
- Tongue
- English
- Weight
- 192 KB
- Volume
- 20
- Category
- Article
- ISSN
- 0741-3106
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