Thin films with high surface roughness: thickness and dielectric function analysis using spectroscopic ellipsometry

✍ Scribed by Lehmann, Daniel; Seidel, Falko; Zahn, Dietrich RT

• Book ID: 121547972
• Publisher: Springer
• Year: 2014
• Tongue: English
• Weight: 599 KB
• Volume: 3
• Category: Article
• ISSN: 2193-1801
• DOI: 10.1186/2193-1801-3-82