Thin Films Deposition from Hexamethyldisiloxane and Hexamethyldisilazane under Dielectric-Barrier Discharge (DBD) Conditions

✍ Scribed by K. Schmidt-Szalowski; Z. Rżanek-Boroch; J. Sentek; Z. Rymuza; Z. Kusznierewicz; M. Misiak

• Book ID: 110299804
• Publisher: Springer
• Year: 2000
• Tongue: English
• Weight: 421 KB
• Volume: 5
• Category: Article
• ISSN: 1084-0184
• DOI: 10.1023/a:1011314420080