✦ LIBER ✦
Effect of N[sub 2] dielectric barrier discharge treatment on the composition of very thin SiO[sub 2]-like films deposited from hexamethyldisiloxane at atmospheric pressure
✍ Scribed by Reuter, R.; Gherardi, N.; Benedikt, J.
- Book ID
- 118020857
- Publisher
- American Institute of Physics
- Year
- 2012
- Tongue
- English
- Weight
- 646 KB
- Volume
- 101
- Category
- Article
- ISSN
- 0003-6951
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