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Nano-particle size-dependent charging and electro-deposition in dielectric barrier discharges at atmospheric pressure for thin SiOx film deposition

✍ Scribed by Jidenko, N; Jimenez, C; Massines, F; Borra, J-P


Book ID
111859504
Publisher
Institute of Physics
Year
2007
Tongue
English
Weight
669 KB
Volume
40
Category
Article
ISSN
0022-3727

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