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Thin-film ZnO as micromechanical actuator at low frequencies

✍ Scribed by F.R. Blom; D.J. Yntema; F.C.M. Van De Pol; M. Elwenspoek; J.H.J. Fluitman; T.H.J.A. Popma

No coin nor oath required. For personal study only.

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