Thin-film thickness profile measurement using wavelet transform in wavelength-scanning interferometry

✍ Scribed by Young-Min Hwang; Sung-Won Yoon; Jung-Hwan Kim; Souk Kim; Heui-Jae Pahk

• Book ID: 108233343
• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 855 KB
• Volume: 46
• Category: Article
• ISSN: 0143-8166
• DOI: 10.1016/j.optlaseng.2007.07.005