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Thin film thickness measurement using the energy-dispersive spectroscopy technique in a scanning electron microscope

✍ Scribed by R. Pascual; L.R. Cruz; C.L. Ferreira; D.T. Gomes

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 377 KB
Volume: 185
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(90)90092-r

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