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Thin film synthesis of tungsten nitride by the CVD method

✍ Scribed by Masatoshi Nagai; Koji Kishida

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 218 KB
Volume: 70-71
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(93)90617-k

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