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Thin film deposition from hexamethyldisiloxane fed glow discharges

✍ Scribed by Ritalba Lamendola; Riccardo d’Agostino; Francesco Fracassi


Book ID
110673421
Publisher
Springer
Year
1997
Tongue
English
Weight
836 KB
Volume
2
Category
Article
ISSN
1084-0184

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