✦ LIBER ✦
Deposition of SiOxFilms from Hexamethyldisiloxane/Oxygen Radiofrequency Glow Discharges: Process Optimization by Plasma Diagnostics
✍ Scribed by Mariadriana Creatore; Fabio Palumbo; Riccardo d'Agostino
- Book ID
- 110391849
- Publisher
- Springer
- Year
- 2002
- Tongue
- English
- Weight
- 422 KB
- Volume
- 7
- Category
- Article
- ISSN
- 1084-0184
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