CuInS2 Thin Films Deposited by ALD
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M. Nanu; L. Reijnen; B. Meester; J. Schoonman; A. Goossens
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Article
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2004
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John Wiley and Sons
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English
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At present, chalcopyrites are widely studied as absorber materials for efficient, low-cost, thin film solar cells. The growth of CuInS 2 thin films by atomic layer deposition (ALD) is studied here. CuInS 2 films are grown on glass, TCO glass (SnO 2 :F-coated glass), and TiO 2 substrates under pressu