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Thickness measurement of a thin-film layer on an anisotropic substrate by phase-sensitive acoustic microscope

✍ Scribed by Sasaki, Y.; Endo, T.; Yamagishi, T.; Sakai, M.


Book ID
126300456
Publisher
IEEE
Year
1992
Tongue
English
Weight
497 KB
Volume
39
Category
Article
ISSN
0885-3010

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