Spectrally resolved white–light phase–shifting interference microscopy for thickness–profile measurements of transparent thin film layers on patterned substrates

✍ Scribed by Debnath, Sanjit K.; Kothiyal, Mahendra P.; Schmit, Joanna; Hariharan, Parameswaran

• Book ID: 115406150
• Publisher: Optical Society of America
• Year: 2006
• Tongue: English
• Weight: 101 KB
• Volume: 14
• Category: Article
• ISSN: 1094-4087
• DOI: 10.1364/OE.14.004662