Spectrally resolved phase-shifting interference microscopy: technique based on optical coherence tomography for profiling a transparent film on a patterned substrate

✍ Scribed by Debnath, Sanjit K. ;Kim, Seung-Woo ;Kothiyal, Mahendra P. ;Hariharan, Parameswaran

• Book ID: 115356002
• Publisher: The Optical Society
• Year: 2010
• Tongue: English
• Weight: 577 KB
• Volume: 49
• Category: Article
• ISSN: 1559-128X
• DOI: 10.1364/AO.49.006624