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Thickness dependences of the structural optical, and electrical properties of Cu2Se thin films grown by using DC magnetron sputtering

✍ Scribed by Ahn, Heejin; Um, Youngho

Book ID
125416520
Publisher
The Korean Physical Society
Year
2014
Tongue
English
Weight
994 KB
Volume
64
Category
Article
ISSN
0374-4884

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Thickness dependence of the structural a
Thickness dependence of the structural and electrical properties of copper films deposited by dc magnetron sputtering technique
✍ Kah-Yoong Chan; Teck-Yong Tou; Bee-San Teo πŸ“‚ Article πŸ“… 2006 πŸ› Elsevier Science 🌐 English βš– 208 KB

This paper addresses the influences of film thickness on structural and electrical properties of dc magnetron sputter-deposited copper (Cu) films on p-type silicon. Cu films with thicknesses of 130-1050 nm were deposited from Cu target at sputtering power of 125 W in argon ambient gas pressure of 3.