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Thickness dependence of the structure of a-C:H thin films prepared by rf-CVD evidenced by Raman spectroscopy

✍ Scribed by M. Veres; S. Tóth; M. Füle; M. Koós

Book ID
116669183
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
173 KB
Volume
352
Category
Article
ISSN
0022-3093

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Thickness dependence of the structure of diamond-like carbon films by Raman spectroscopy
✍ Fan-Xin Liu; Zhen-Lin Wang 📂 Article 📅 2009 🏛 Elsevier Science 🌐 English ⚖ 610 KB

The thickness dependence on structure of Diamond-like carbon films of a-C:H deposited by ECR-CVD and ta-C by FCVA has been studied by visible and UV Raman spectroscopy. The results show that the evolution of structure as a function of the thickness for a-C:H films contains two stages: when thickness