Preparation of water-repellent thin film by RF pulse-modulated plasma CVD using C2H2F2 gas

✍ Scribed by Y. Ohtsu; Y. Masuda; S. Yazaki; T. Misawa; H. Fujita

• Book ID: 108278440
• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 253 KB
• Volume: 202
• Category: Article
• ISSN: 0257-8972
• DOI: 10.1016/j.surfcoat.2008.06.014