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Thick CrN/AlN superlattice coatings deposited by the hybrid modulated pulsed power and pulsed dc magnetron sputtering

โœ Scribed by Lin, Jianliang; Zhang, Niingyi; Wu, Zhili; Sproul, William D.; Kaufman, Michael; Lei, Mingkai; Moore, John J.


Book ID
121438892
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
914 KB
Volume
228
Category
Article
ISSN
0257-8972

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