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High rate deposition of thick CrN and Cr2N coatings using modulated pulse power (MPP) magnetron sputtering

✍ Scribed by Jianliang Lin; William D. Sproul; John J. Moore; Sabrina Lee; Sterling Myers


Book ID
108278731
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
846 KB
Volume
205
Category
Article
ISSN
0257-8972

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