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Thermoelectric properties of manganese silicide films

✍ Scribed by Q.R. Hou; Z.M. Wang; Y.J. He


Book ID
106019167
Publisher
Springer
Year
2004
Tongue
English
Weight
341 KB
Volume
80
Category
Article
ISSN
1432-0630

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## Abstract Polycrystalline higher manganese silicide (MnSi~1.73~, HMS) films with addition of carbon were prepared on thermally oxidized silicon substrates by magnetron sputtering. A carbon cap layer was used as the doping source. Both the Seebeck coefficient and the resistivity were strongly depe

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