Thermoelectric infrared sensors in CMOS technology

✍ Scribed by R. Lenggenhager; H. Baltes; T. Elbel

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 894 KB
• Volume: 37-38
• Category: Article
• ISSN: 0924-4247
• DOI: 10.1016/0924-4247(93)80037-h

✦ Synopsis

We report several Integrated thermoelectnc Infrared sensors on thm sIllcon oxlde/tntrlde rmcrostructures realized by mdustnal CMOS IC technology, followed by one compatible maskless amsotroplc etchmg step No addltlonal matenal IS needed to enhance mfrared absorption in the spectral region between 8 and 14 pm, since the passrvatlon layer, as provided by the CMOS process, shows slgmficant absorption bands We compare ahmumum/polyslllcon thermoplles with n-poly/p-poly thermoplles Our sensors show responslvltles between 12 and 72 V/W, normahzed detectwltles between 1 7 x IO7 and 2 4 x 10' cm&/W and time constants of IO-20 ms