𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Capacitive sensors in CMOS technology with polymer coating

✍ Scribed by C. Cornila; A. Hierlemann; R. Lenggenhager; P. Malcovati; H. Baltes; G. Noetzel; U. Weimar; W. Go¨pel

Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
692 KB
Volume
25
Category
Article
ISSN
0925-4005

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Thermoelectric infrared sensors in CMOS
Thermoelectric infrared sensors in CMOS technology
✍ R. Lenggenhager; H. Baltes; T. Elbel 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 894 KB

We report several Integrated thermoelectnc Infrared sensors on thm sIllcon oxlde/tntrlde rmcrostructures realized by mdustnal CMOS IC technology, followed by one compatible maskless amsotroplc etchmg step No addltlonal matenal IS needed to enhance mfrared absorption in the spectral region between 8

Controlled selectivity of polysiloxane c
Controlled selectivity of polysiloxane coatings: Their use in capacitance sensors
✍ M. Haug; K.D. Schierbaum; H.E. Endres; S. Drost; W. Göpel 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 519 KB

Capacitance sensors were prepared by spin-on coating interdigital thin-film structures with chemically modified polymers. The sensors were characterized electrically by their frequency response behaviour and spectroscopically by Fourier transform infrared spectroscopy (FTIR). The electrical response

Development of deep N-well monolithic ac
Development of deep N-well monolithic active pixel sensors in a CMOS technology
✍ S. Bettarini; A. Bardi; G. Batignani; F. Bosi; G. Calderini; R. Cenci; M. Dell’O 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 158 KB

By exploiting the triple-well option available in a deep-submicron CMOS process, we developed monolithic active pixel sensors (MAPS) with the unique features of full analog signal processing and digital functionality implemented at the pixel level. After briefly reviewing the results achieved with t