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Thermoelastic Ultrasonic Actuator With Piezoresistive Sensing and Integrated Through-Silicon Vias

✍ Scribed by Griffin, B.A.; Chandrasekaran, V.; Sheplak, M.

Book ID: 114563652
Publisher: IEEE
Year: 2012
Tongue: English
Weight: 683 KB
Volume: 21
Category: Article
ISSN: 1057-7157
DOI: 10.1109/jmems.2011.2178114

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