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Thermoelastic dissipation of hollow micromechanical resonators

✍ Scribed by K. Tunvir; C.Q. Ru; A. Mioduchowski


Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
786 KB
Volume
42
Category
Article
ISSN
1386-9477

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A high quality factor (Q-factor) is one of the major requirements of high-performance resonators. An understanding of the dissipation mechanism is crucial for maximizing the quality factor by reducing the energy loss. Thermoelastic damping has been wellknown as the important intrinsic dissipation th