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Frequency dependence of thermal excitation of micromechanical resonators

✍ Scribed by Theo S.J. Lammerink; Miko Elwenspoek; Jan H.J. Fluitman

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 377 KB
Volume: 27
Category: Article
ISSN: 0924-4247
DOI: 10.1016/0924-4247(91)87071-a

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