✦ LIBER ✦

Efficient prediction of the quality factors of micromechanical resonators

✍ Scribed by Jinbok Choi; Maenghyo Cho; Jaewook Rhim

Publisher: Elsevier Science
Year: 2010
Tongue: English
Weight: 476 KB
Volume: 329
Category: Article
ISSN: 0022-460X
DOI: 10.1016/j.jsv.2009.09.013

No coin nor oath required. For personal study only.

✦ Synopsis

A high quality factor (Q-factor) is one of the major requirements of high-performance resonators. An understanding of the dissipation mechanism is crucial for maximizing the quality factor by reducing the energy loss. Thermoelastic damping has been wellknown as the important intrinsic dissipation that affects the quality factor of microresonators. In this study, a finite element formulation based on the weak form of fully coupled thermoelastic problems is suggested. The coupled thermoelastic equation usually leads to a large-size complex eigenvalue problem, which is very massive and time-consuming to solve. Therefore, we also applied the model order reduction (MOR) scheme to this coupled multiphysical problem in order to achieve computational efficiency. The present approach is validated by comparing the numerical results and analytical solutions.

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